Micro fluid-handling systems: state of the art and opportunities
- 1 January 1991
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 30 references indexed in Scilit:
- Ultrasonically induced microtransportPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface-machined micromechanical membrane pumpPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A micromachined flow sensor for measuring small liquid flowsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- High-sensivity 2-D flow sensor with an etched thermal isolation structureSensors and Actuators A: Physical, 1990
- Fibre optic sensors for the characterization of particle size and flow velocitySensors and Actuators A: Physical, 1990
- Integrated micro flow control systemsSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- Design of an open-tubular column liquid chromatograph using silicon chip technologySensors and Actuators B: Chemical, 1990
- Surface Acoustic Wave Flow SensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1985
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978