High-sensivity 2-D flow sensor with an etched thermal isolation structure
- 1 June 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 22 (1-3) , 425-430
- https://doi.org/10.1016/0924-4247(89)80007-x
Abstract
No abstract availableKeywords
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