Abstract
The author describes a thermal sensor which detects flow on the basis of a flow-induced temperature gradient on its surface. A theoretical model has been developed to investigate the influence of design parameters such as sensor dimensions and material properties on the sensitivity and the time response of the sensor. The behaviour of the sensor has been analysed for laminar and turbulent shear flow, showing that the presence of turbulence will increase the total heat transfer, while reducing the induced temperature difference. Flow experiments have been performed in laminar and turbulent flow with an integrated silicon sensor, and the results of the tests were found to be in good agreement with the predictions from theory.

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