Thermal-Wave Imaging
- 15 October 1982
- journal article
- research article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 218 (4569) , 223-228
- https://doi.org/10.1126/science.218.4569.223
Abstract
Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.Keywords
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