Film growth mechanism of photo-chemical vapor deposition
- 1 November 1988
- journal article
- photoformation of-dielectrics-ii
- Published by Springer Nature in Applied Physics A
- Vol. 47 (3) , 229-236
- https://doi.org/10.1007/bf00615928
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Chemical vapour deposition of silicon films in capillary layersThin Solid Films, 1982
- Laser Photolytic Deposition of Thin FilmsMRS Proceedings, 1982
- A MESFET model for circuit analysisSolid-State Electronics, 1980
- Crystal growth from solutionsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1938