Fundamental Role of Creation and Activation in Radiation-Induced Defect Production in High-Purity Amorphous Si
- 15 April 1996
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 76 (16) , 2926-2929
- https://doi.org/10.1103/physrevlett.76.2926
Abstract
A model for the radiation-induced production of defects in amorphous insulators is proposed. It is shown that an irreversible creation of defects from network sites follows power law kinetics, and a reversible activation of precursor sites follows Kohlrausch kinetics. Electron spin resonance was used to measure the concentration of x-ray induced centers in high-purity amorphous Si over an extremely wide dose range with high precision. The agreement between theoretical and experimental defect densities, over more than 4 orders of magnitude in dose, is unprecedented.
Keywords
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