Interlaboratory comparison of the depth resolution in sputter depth profiling of Ni/Cr multilayers with and without sample rotation using AES, XPS, and SIMS
- 1 July 1993
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 20 (8) , 621-626
- https://doi.org/10.1002/sia.740200803
Abstract
No abstract availableKeywords
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