Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor
- 1 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (3) , 187-192
- https://doi.org/10.1016/0924-4247(95)01000-9
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A low power integrated catalytic gas sensorSensors and Actuators B: Chemical, 1993
- Oscillatory Reactions in Heterogeneous CatalysisPublished by Elsevier ,1993
- The Si planar pellistor: a low-power pellistor sensor in Si thin-film technologySensors and Actuators B: Chemical, 1991