Control of ionization in e-beam evaporators via optimum choice of focus-coil current
- 1 August 1989
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 60 (8) , 2794-2796
- https://doi.org/10.1063/1.1140660
Abstract
E‐beam evaporation is accompanied by production of a significant ionic component, which is a result of interaction of electrons with residual gas atoms as well as vapor atoms. In this study we show that the interaction of primary beam electrons with vapor atoms can be controlled to a certain extent by choosing the correct magnetic lens current. This technique can be used to reduce or enhance the extent of ionization depending upon the application.Keywords
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