Deposition of heteroepitaxial diamond films on 2 in silicon substrates
- 1 April 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (3-5) , 251-255
- https://doi.org/10.1016/0925-9635(95)00477-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Diamond epitaxy on (001) silicon: An interface investigationApplied Physics Letters, 1995
- Deposition and characterization of diamond epitaxial thin films on silicon substratesApplied Physics A, 1993
- Epitaxial diamond thin films on (001) silicon substratesApplied Physics Letters, 1993
- Highly oriented, textured diamond films on silicon via bias-enhanced nucleation and textured growthJournal of Materials Research, 1993
- An investigation of electromagnetic field patterns during microwave plasma diamond thin film depositionJournal of Vacuum Science & Technology A, 1990