Excimer laser-induced sputtering of YBa2Cu3O7−x
- 1 October 1988
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 3 (5) , 825-829
- https://doi.org/10.1557/jmr.1988.0825
Abstract
Excimer laser-induced sputtering of YBa2Cu3O7−x targets has been investigated. Two aspects of this process are reported here: the spectral content of the emission and sputtering of the target. Postsputtering analysis of the sputtered area of the target shows a nonstoichiometric composition: rich in Cu but depleted of Ba and Y.Keywords
This publication has 10 references indexed in Scilit:
- Surface compositional and topographical changes resulting from excimer laser impacting on YBa2Cu3O7 single phase superconductorsApplied Physics Letters, 1988
- Formation of thin superconducting films by the laser processing methodApplied Physics Letters, 1987
- Growth of high T c superconducting thin films using molecular beam epitaxy techniquesApplied Physics Letters, 1987
- Pulsed laser etching of high T c superconducting filmsApplied Physics Letters, 1987
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Plasma oxidation of the high T c superconducting perovskitesApplied Physics Letters, 1987
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987
- PHASE EQUILIBRIA AND CRYSTAL CHEMISTRY IN THE SYSTEM Ba-Y-Cu-O*Advanced Ceramic Materials, 1987
- Thin superconducting oxide filmsPhysical Review B, 1987
- Tables of Spectral LinesPublished by Springer Nature ,1970