Dynamic piezoelectric translation devices
- 1 January 1987
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 58 (1) , 54-57
- https://doi.org/10.1063/1.1139566
Abstract
The principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric fine-positioning device. The device provides step sizes of 0.04–0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range. It is powered by a sawtooth electric waveform of 60–300-V amplitude and useable for loads of up to 1 kg and probably even more. Mechanical parts and driver electronics are extremely simple, reliable, and easy to operate.Keywords
This publication has 5 references indexed in Scilit:
- Near-field optical-scanning microscopyJournal of Applied Physics, 1986
- Scanning tunneling potentiometryApplied Physics Letters, 1986
- Scanning tunneling microscope combined with a scanning electron microscopeReview of Scientific Instruments, 1986
- An electromagnetic microscopic positioning device for the scanning tunneling microscopeJournal of Applied Physics, 1985
- 7 × 7 Reconstruction on Si(111) Resolved in Real SpacePhysical Review Letters, 1983