Optical detection of quasi-static actuation of nanoelectromechanical systems
- 22 September 2003
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 83 (12) , 2420-2422
- https://doi.org/10.1063/1.1608491
Abstract
An all optical method designed to test the functionality of nanoelectromechanical systems is presented. Silicon tweezers consisting of freestanding nanometer-sized prongs are prepared using electron beam lithography. Images of the tweezers structures are taken by scanning confocal microscopy while the prongs are electrostatically actuated under a low frequency ac voltage. The images, which are demodulated at the actuation frequency and its higher harmonics, clearly resolve the actuating parts of the tweezers. An actuation amplitude down to 6 pm can be detected.
Keywords
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