Optical study of self-annealing in high-current arsenic-implanted silicon
- 1 October 1985
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 58 (7) , 2773-2776
- https://doi.org/10.1063/1.335869
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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