Fabrication of large-core 1 x 16 optical power splitters in polymers using hot-embossing process
- 21 May 2003
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 15 (6) , 825-827
- https://doi.org/10.1109/lpt.2003.811139
Abstract
Large-core (42 /spl times/43 /spl mu/m) 1/spl times/16 optical power splitters in polymers have been fabricated. Y-branch waveguide structures with and without offsets in the arc-bending regions were designed by the beam propagation method software and molded by a silicon-mold master using a hot-embossing process. The optical power splitters were produced by epoxy core filling and ultraviolet curing processes. The average insertion losses at a wavelength of 850 nm were measured to be 19.8 dB with offset and 17.1 dB without offset, respectively. The maximum uniformities were 3.3 dB with offset and 3.9 dB without offset, respectively.Keywords
This publication has 8 references indexed in Scilit:
- Low-loss polymeric optical waveguides using electron-beam direct writingApplied Physics Letters, 2001
- Ray tracing technique and its verification for the analysis of highly multimode optical waveguides with rough surfacesIEEE Transactions on Magnetics, 2001
- Hot embossing as a method for the fabrication of polymer high aspect ratio structuresSensors and Actuators A: Physical, 2000
- Hot embossing - The molding technique for plastic microstructuresMicrosystem Technologies, 1998
- Fabrication of LIGA mold insertsMicrosystem Technologies, 1998
- Comparative study of hot embossed micro structures fabricated by laboratory and commercial environmentsMicrosystem Technologies, 1998
- Laser-fabricated low-loss single-mode raised-rib waveguiding devices in polymersJournal of Lightwave Technology, 1996
- Fabrication of large-core, high-Δ optical waveguides in polymersApplied Optics, 1995