Hot embossing as a method for the fabrication of polymer high aspect ratio structures

This publication has 6 references indexed in Scilit:

• Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
  Published by SPIE-Intl Soc Optical Eng ,1999
• Technology for movable microstructures - Transfer of laboratory processes to industrial production
  Microsystem Technologies, 1998
• Fabricating Large Arrays of Microwells with Arbitrary Dimensions and Filling Them Using Discontinuous Dewetting
  Analytical Chemistry, 1998
• High-throughput genetic analysis using microfabricated 96-sample capillary array electrophoresis microplates
  Proceedings of the National Academy of Sciences, 1998
• Planar quartz chips with submicron channels for two-dimensional capillary electrophoresis applications
  Journal of Micromechanics and Microengineering, 1998
• Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
  Microelectronic Engineering, 1986