Selective etching of Au-Ge alloy films on GaAs
- 1 February 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 41 (1) , L3-L4
- https://doi.org/10.1016/0040-6090(77)90016-5
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- A review of the theory and technology for ohmic contacts to group III–V compound semiconductorsSolid-State Electronics, 1975
- Gallium Arsenide Surface Film Evaluation by Ellipsometry Its Effect on Schottky BarriersJournal of the Electrochemical Society, 1973
- Alloying Behavior of Au and Au–Ge on GaAsJournal of Applied Physics, 1971
- Preliminary Results on the Oxidation of GaAs and GaP during Chemical EtchingJournal of the Electrochemical Society, 1971