Electrical Characteristics of High Pressure Nitrided Oxides
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
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- Low Energy Nitrogen Implantation into Silicon: Its Material Composition, Oxidation Resistance, and Electrical CharacteristicsJournal of the Electrochemical Society, 1982
- Effect of Thermally Nitrided SiO2 (Nitroxide) on MOS CharacteristicsJournal of the Electrochemical Society, 1982