Raman scattering spectra and electrical conductivity of thin silicon films with a mixed amorphous-nanocrystalline phase composition: Determination of the nanocrystalline volume fraction
- 1 August 1997
- journal article
- Published by Pleiades Publishing Ltd in Physics of the Solid State
- Vol. 39 (8) , 1197-1201
- https://doi.org/10.1134/1.1130042
Abstract
Raman spectra and electrical conductivity of thin films of hydrogenated silicon with mixed amorphous-nanocrystalline phase composition have been studied. It is shown that interpretation of experimental data in terms of percolation theory permits one to determine the integrated Raman-scattering cross-section ratio of the nanocrystalline to amorphous phase and to obtain a quantitative estimate of the volume fraction of each phase.Keywords
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