Fourier Transform Infrared Determination of Parts per Billion of Oxygen in Silicon
- 1 January 1974
- journal article
- other
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 28 (1) , 65-66
- https://doi.org/10.1366/000370274774332911
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Comparison of Infrared and Activation Analysis Results in Determining the Oxygen and Carbon Content in SiliconJournal of the Electrochemical Society, 1972
- Determination of parts per billion of oxygen in siliconSolid-State Electronics, 1970
- Improvement in the detection of oxygen in silicon by infra-red absorptionSolid-State Electronics, 1969