Fabrication of high-packing-density vertical cavity surface-emitting laser arrays using selective oxidation
- 1 May 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (5) , 596-598
- https://doi.org/10.1109/68.491550
Abstract
We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to Al/sub x/O/sub y/. The individual lasers of 8/spl times/8 and 2/spl times/2 arrays are defined by native Al/sub x/O/sub y/ to achieve 4-/spl mu/m square active regions on 12-/spl mu/m center-to-center spacings. Interelement thermal coupling is characterized along with the optical mode structure.Keywords
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