Small-angle neutron scattering study of anisotropic growth morphology and irreversible photodensification in-Gefilms
- 15 July 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 28 (2) , 1174-1177
- https://doi.org/10.1103/physrevb.28.1174
Abstract
The anisotropic growth morphology of obliquely evaporated amorphous Ge thin films has been studied by small-angle neutron scattering. Films deposited at 80° to the normal contain ellipsoidal voids 240 Å in length and 120 Å in diameter inclined at 70° to the normal, and which account for 47% of the volume. Absorption of band-gap light reduces the level and anisotropy of the scattering. The ellipsoidal voids collapse to form smaller spherical voids distributed isotropically.
Keywords
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