Optical microshutters and torsional micromirrors for light modulator arrays

This publication has 4 references indexed in Scilit:

• Investigations on free-standing polysilicon beams in view of their application as transducers
  Sensors and Actuators A: Physical, 1990
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• Techniques in Failure Analysis of MOS Devices
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1974
• The resonant gate transistor
  IEEE Transactions on Electron Devices, 1967