Determining Concentration vs. Depth Profiles from Backscattering Spectra without Using Energy Loss Values
- 1 January 1976
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- An analytic solution to elastic backscatteringJournal of Applied Physics, 1975
- Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92, E(4He) = 400–4000 keVAtomic Data and Nuclear Data Tables, 1974
- Characterization of silicon metallization systems using energetic ion backscatteringProceedings of the IEEE, 1974
- Theoretical analysis of the energy spectra of back-scattered ionsThin Solid Films, 1973
- Principles and applications of ion beam techniques for the analysis of solids and thin filmsThin Solid Films, 1973
- XXXIX. On the α particles of radium, and their loss of range in passing through various atoms and moleculesJournal of Computers in Education, 1905