Kinetic energy distributions of sputtered particles in non-casade sputtering processes
- 15 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3) , 742-746
- https://doi.org/10.1016/0167-5087(83)91075-x
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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