A Direct Mapping Algorithm for Phase-measuring Profilometry
- 1 January 1994
- journal article
- research article
- Published by Taylor & Francis in Journal of Modern Optics
- Vol. 41 (1) , 89-94
- https://doi.org/10.1080/09500349414550101
Abstract
A direct phase-to-height mapping algorithm for phase-measuring profilometry is presented and verified by experiments. The direct mapping formula can be generated by measuring the phases of several different parallel planes rather than geometric parameters of the optical system. Therefore, it can speed up the calculation and reduce systematic errors.Keywords
This publication has 3 references indexed in Scilit:
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- Automated phase-measuring profilometry: a phase mapping approachApplied Optics, 1985
- Automated phase-measuring profilometry of 3-D diffuse objectsApplied Optics, 1984