Characterisation of TiN films prepared by electron shower, arc ion‐plating and sputtering methods
- 1 July 1995
- journal article
- research article
- Published by Wiley in Advanced Materials for Optics and Electronics
- Vol. 5 (4) , 191-198
- https://doi.org/10.1002/amo.860050403
Abstract
No abstract availableKeywords
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