LIGA and related technologies for industrial application
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 785-789
- https://doi.org/10.1016/s0924-4247(97)80056-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micropump manufactured by thermoplastic moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Acceleration sensor with integrated compensation of temperature effects fabricated by the LIGA processSensors and Actuators A: Physical, 1994