Single-chip CMOS anemometer
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01631918,p. 895-898
- https://doi.org/10.1109/iedm.1997.650525
Abstract
For the first time a packaged single-chip anemometry microsystem is reported. The system includes a thermal CMOS flow sensor with on-chip power management, signal conditioning, and A/D conversion. It is fabricated using an industrial IC process followed by post-CMOS micromachining. The system is packaged on a flexible substrate using flip-chip interconnection technology. The measurement of wind speeds is demonstrated in the range from 0 to 38 m/s (0 to 12 Beaufort), with a dynamic range of 65 dB. Total power consumption is 3 mW.Keywords
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