IC MEMS microtransducers
- 23 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01631918,p. 521-524
- https://doi.org/10.1109/iedm.1996.553858
Abstract
This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.Keywords
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