Soft X-ray reflectometer with a laser-produced plasma source
Open Access
- 1 June 1990
- journal article
- Published by IOP Publishing in Physica Scripta
- Vol. 41 (6) , 754-757
- https://doi.org/10.1088/0031-8949/41/6/005
Abstract
A soft X-ray reflectometer with a laser-produced plasma source driven by a Q-switched Nd: YAG laser or a XeCl excimer laser was constructed. By comparing the reflectances of a multilayer mirror with the data obtained using synchrotron radiation, its usefulness for reflectance measurements in the soft X-ray region (40-130 eV) is demonstrated.Keywords
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