AMANDA—surface micromachining, molding, and diaphragm transfer
- 30 August 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 76 (1-3) , 343-348
- https://doi.org/10.1016/s0924-4247(98)00292-1
Abstract
No abstract availableKeywords
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