Anodic bonding of silicon to silicon wafers coated with aluminium, silicon oxide, polysilicon or silicon nitride
- 1 June 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 61-67
- https://doi.org/10.1016/0924-4247(93)80013-7
Abstract
No abstract availableKeywords
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