Study of PZT Film Stress in Multilayer Structures for MEMS Devices
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Analysis of the stress and interfacial reactions in Pt/Ti/SiO2/Si for use with ferroelectric thin filmsJournal of Electronic Materials, 1998
- Stresses in Pt/Pb(Zr,Ti)O3/Pt thin-film stacks for integrated ferroelectric capacitorsJournal of Applied Physics, 1995
- Principles and Applications of Wafer Curvature Techniques for Stress Measurements in Thin FilmsMRS Proceedings, 1988