Structural and optical properties of sol-gel-processed BaTiO3 ferroelectric thin films
- 30 December 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (27) , 3547-3549
- https://doi.org/10.1063/1.105653
Abstract
BaTiO3 thin films having a perovskite structure were deposited onto stainless steel and fused quartz substrates by sol‐gel processing. Crystalline, transparent, and crack‐free films of 5000 Å thickness were fabricated by spinning and post‐deposition annealing at a temperature of 600 °C. Ferroelectric properties were confirmed by P‐E hysteresis loops. The dielectric constant and optical transmission were also measured.Keywords
This publication has 9 references indexed in Scilit:
- High charge storage in amorphous BaTiO3 thin filmsApplied Physics Letters, 1991
- Metalorganic chemical vapor deposition of BaTiO3 thin filmsJournal of Applied Physics, 1991
- Preparation of ferroelectric BaTiO3 thin films by activated reactive evaporationApplied Physics Letters, 1990
- Epitaxial growth of thin films of BaTiO3 using excimer laser ablationApplied Physics Letters, 1989
- Fabrication of BaTiO3films by RF planar-magnetron sputteringFerroelectrics, 1981
- Preparation of Pb(Zr,Ti)O3 thin films by an electron beam evaporation techniqueApplied Physics Letters, 1976
- RF Sputtered Strontium Titanate FilmsIBM Journal of Research and Development, 1969
- Formation of Thin Films of BaTiO3 by EvaporationReview of Scientific Instruments, 1955
- Double Hysteresis Loop of BaTiat the Curie PointPhysical Review B, 1953