AlN crystal growth in AlN0.8 thin films induced by Ne-bombardment
- 1 March 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 65 (1-4) , 311-314
- https://doi.org/10.1016/0168-583x(92)95057-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Medical applications of ion beam processesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Formation of ain by nitrogen molecule ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987