Lattice orientation of microcrystallites in μc-Si:H
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 114, 819-821
- https://doi.org/10.1016/0022-3093(89)90731-x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Hydrogenated amorphous silicon prepared by ArF and F2 excimer laser-induced photochemical vapor depositionApplied Physics Letters, 1987
- Photochemical vapor deposition of hydrogenated amorphous silicon films from disilane and trisilane using a low pressure mercury lampApplied Physics Letters, 1986
- Ar (3P2) induced chemical vapor deposition of hydrogenated amorphous siliconApplied Physics Letters, 1985
- Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasmaJournal of Non-Crystalline Solids, 1983
- Kinetics of atomic hydrogen reactions in the gas phaseChemical Reviews, 1973