Scattering loss reduction in ZnO optical waveguides by laser annealing
- 1 August 1981
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (3) , 206-208
- https://doi.org/10.1063/1.92680
Abstract
We report successful laser annealing of ZnO optical waveguides deposited on an amorphous SiO2 layer thermally grown on Si. A significant improvement in the optical attenuation of the fundamental mode from several dB/cm before laser annealing to as low as 0.01 dB/cm after laser annealing is observed. Scattering loss measurements for the m = 1 and m = 2 mode are also reported. We attribute the reduction in loss primarily to an improvement in the quality of the ZnO film in the region near the ZnO‐SiO2 interface.Keywords
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