Influence of gas added to the MEVVA discharge on the extracted ion beama)
- 1 October 1994
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (10) , 3113-3118
- https://doi.org/10.1063/1.1144764
Abstract
The presence of background gas in the discharge chamber of the metal vapor vacuum arc source influences the extracted beam. We have observed a strong influence of the background gas pressure in the arc region on the total extracted beam current and on the charge state distribution of the metallic ions. Different gases have been investigated together with different cathode materials. Up to 90% of the total beam current can be gaseous ions, depending on the arc and gas injection conditions.Keywords
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