In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide
- 1 February 2003
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 426 (1-2) , 238-245
- https://doi.org/10.1016/s0040-6090(03)00029-4
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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