Vacuum ultraviolet generation by anti-Stokes Raman scattering of KrF laser radiation in H2

Abstract
The eleventh anti‐Stokes order at 116 nm of the KrF excimer laser radiation was obtained in H2 gas at room temperature. The effects of the depletion of the first Stokes order by the S1‐S2 Raman conversion on the efficient vacuum ultraviolet anti‐Stokes generation was studied, and it determined the optimal Raman gain coefficient in this experiment. Ne gas was added into hydrogen gas to suppress the S1‐S2 conversion, and the significant increase in the conversion efficiency for the lower anti‐Stokes orders was observed in certain circumstances.