Fabrication and Characterisation of Poly-Si TFTs on Glass

This publication has 32 references indexed in Scilit:

• Beam Shape Effects with Excimer Laser Crystallisation of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Amorphous Silicon
  Solid State Phenomena, 1994
• Laser dehydrogenation/crystallization of plasma-enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors
  Applied Physics Letters, 1994
• Excimer-laser-annealed poly-Si thin-film transistors
  IEEE Transactions on Electron Devices, 1993
• Structure of As‐Deposited LPCVD Silicon Films at Low Deposition Temperatures and Pressures
  Journal of the Electrochemical Society, 1992
• Pulsed-Laser Annealing of Silicon Films
  MRS Proceedings, 1992
• Low Temperature Fabrication of Poly-Si TFTs using in-situ Chemically Cleaning Method
  MRS Proceedings, 1992
• Characterisation of low temperature poly-Si thin film transistors
  Solid-State Electronics, 1991
• High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film
  IEEE Transactions on Electron Devices, 1989
• High performance low-temperature poly-Si n-channel TFTs for LCD
  IEEE Transactions on Electron Devices, 1989
• The Effect of Low Pressure on the Structure of LPCVD Polycrystalline Silicon Films
  Journal of the Electrochemical Society, 1987