Composition of Evaporated Boron Nitride Films by Carbon Dioxide and Excimer Laser

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Abstract
This paper presents a comparison of the chemical composition of boron nitride (BN) films formed by physical vapor deposition using two lasers operating at different wavelengths. The lasers used were a carbon dioxide (CO2) laser, operating in the infrared region, and a KrF excimer laser, operating in the ultraviolet region. A BN target irradiated with the CO2 iaser showed an absence of nitrogen and the deposited film was composed nearly entirely of metallic boron. On the other hand, the BN film deposited with the excimer laser was virtually stoichiometric. A stoichiometric film was also obtained with the CO2 laser when an RF plasma discharge was applied between the target and the substrate. However, the spectra of X-ray photoelectron spectroscopy (XPS) of the film deposited with the excimer laser showed a narrower peak width at half height and the film had a more homogenous BN composition.

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