Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O
- 31 October 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (18) , 1762-1764
- https://doi.org/10.1063/1.100477
Abstract
Photoluminescence spectroscopy of the plasma plume during plasma‐assisted laser deposition of YBa2Cu3O7−x was performed. The spectrum in the range of 355–900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O+, Y, Y+, Ba, Ba+, and Cu were observed, from which the plasma temperature could be estimated. Cu+ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin‐film formation is discussed.Keywords
This publication has 12 references indexed in Scilit:
- Smooth high T c Y1Ba2Cu3Ox films by laser deposition at 650 °CApplied Physics Letters, 1988
- Preparation of oriented Bi-Ca-Sr-Cu-O thin films using pulsed laser depositionApplied Physics Letters, 1988
- Superconducting thin films of Bi-Sr-Ca-Cu-O obtained by laser ablation processingApplied Physics Letters, 1988
- Deposition of superconducting Y-Ba-Cu-O films at 400 °C without post-annealingApplied Physics Letters, 1988
- Spectroscopic analysis of electronically excited species in XeCl excimer laser-induced plasmas from the ablated high-temperature superconductor YBa2Cu3O7Applied Physics Letters, 1988
- Plasma emission from laser ablation of the high-temperature superconductor YBa2Cu3O7Applied Physics Letters, 1988
- Laser evaporation deposition of superconducting and dielectric thin filmsApplied Physics Letters, 1988
- Superconducting thin films of Y-Ba-Cu-O produced by neodymium:yttrium aluminum garnet laser ablationApplied Physics Letters, 1988
- Formation of thin superconducting films by the laser processing methodApplied Physics Letters, 1987
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987