Laser evaporation deposition of superconducting and dielectric thin films
- 23 May 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (21) , 1825-1827
- https://doi.org/10.1063/1.99727
Abstract
We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.Keywords
This publication has 9 references indexed in Scilit:
- Growth of highly oriented CdS thin films by laser-evaporation depositionApplied Physics Letters, 1988
- Superconducting thin films of Y-Ba-Cu-O produced by neodymium:yttrium aluminum garnet laser ablationApplied Physics Letters, 1988
- Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealingApplied Physics Letters, 1987
- Epitaxial ordering of oxide superconductor thin films on (100) SrTiO3 prepared by pulsed laser evaporationApplied Physics Letters, 1987
- Preparation of superconducting YBa2Cu3Ox thin films by oxygen annealing of multilayer metal filmsApplied Physics Letters, 1987
- Cadmium arsenide films prepared by pulsed laser evaporation: electrical proerties and lattice parametersThin Solid Films, 1987
- Electron Tunneling Study of Superconducting Proximity Effect in Silicon Backed with Pb AlloyJapanese Journal of Applied Physics, 1987
- HgTe and CdTe epitaxial layers and HgTe–CdTe superlattices grown by laser molecular beam epitaxyJournal of Vacuum Science & Technology A, 1986
- Laser-assisted sputtering of Pb1−x Cd x Se filmsJournal of Materials Science Letters, 1986