Preparation of superconducting YBa2Cu3Ox thin films by oxygen annealing of multilayer metal films
- 14 September 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (11) , 858-860
- https://doi.org/10.1063/1.98836
Abstract
Superconducting thin films consisting predominantly of YBa2Cu3Ox have been prepared by oxygen annealing of metal films formed by using electron beam evaporation to deposit a three‐layer sequence of Cu, Ba, and Y in nominally stoichiometric proportions, then repeating the sequence five times. For the best superconducting films, which were prepared on yttria‐stabilized cubic zirconia substrates, the onset of superconductivity occurred at 94 K and zero resistivity was observed at 72 K. For the best films prepared on sapphire substrates, the corresponding temperatures were 95 and 40 K.Keywords
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