Plasma emission from laser ablation of the high-temperature superconductor YBa2Cu3O7
- 20 June 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (25) , 2171-2173
- https://doi.org/10.1063/1.99759
Abstract
Emission spectra generated during the excimer laser ablation of the high‐temperature superconductor YBa2Cu3O7 at 193 nm are presented. The feasibility of using this emission as a signal source for a thin‐film deposition process monitor is discussed. Results indicate the formation of a partially ionized plasma above the target surface.Keywords
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- Determination of ratio in the superconductor YBa2Cu3O8−xJournal of Solid State Chemistry, 1987