Radiation degradation behavior of chlorine‐containing vinyl copolymers. Search for improved electron‐beam resists
- 1 June 1980
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 20 (9) , 630-636
- https://doi.org/10.1002/pen.760200908
Abstract
No abstract availableKeywords
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