Deposition, annealing and characterisation of high‐dielectric‐constant metal oxide films
- 1 May 1995
- journal article
- research article
- Published by Wiley in Advanced Materials for Optics and Electronics
- Vol. 5 (3) , 163-175
- https://doi.org/10.1002/amo.860050305
Abstract
No abstract availableKeywords
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