The Mechanism of Chemical Vapor Deposition of Cubic Boron Nitride Films from Fluorine‐Containing Species
- 18 July 2005
- journal article
- research article
- Published by Wiley in Angewandte Chemie International Edition in English
- Vol. 44 (30) , 4749-4753
- https://doi.org/10.1002/anie.200500320
Abstract
No abstract availableKeywords
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